Ultrashallow defect-free junction formation by excimer laser annealing

Popadic, M; Nanver, LK; van der Cingel, J.

Ultrashallow defect-free junction formation by excimer laser annealing

Conference paper (2008)

Authors

M Popadic Electronic Components, Technology and Materials

LK Nanver Electronic Components, Technology and Materials

J. van der Cingel Old - EWI Sect. ECTM

Research Group

Electronic Components, Technology and Materials

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Published Date

2008

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Research Group

Electronic Components, Technology and Materials

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