Mono crystalline silicon microhotplate heater

Mihailovic, M.; Creemer, J.F.; Sarro, Pasqualina M

Mono crystalline silicon microhotplate heater

Conference paper (2008)

Authors

M. Mihailovic Electronic Components, Technology and Materials -

J.F. Creemer Old - EWI Sect. ECTM

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2008

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials