Phase control and stability of thin silicon films deposited from silane diluted with hydrogen

Conference paper (2007)

Authors

G van Elzakker Electronic Components, Technology and Materials - EEMCS
P Sutta External organisation
M. Zeman Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2007

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials