Kinetics and crystal orientation dependence in high aspect ratio silicon dry etching.

Conference paper (2000)

Authors

MA Blauw QN/Kavli Nanolab Delft
T Zijlstra QN/Kavli Nanolab Delft
RA Bakker Old - sect Kramers Laboratory (MSP/FT)
E.W.J.M. van der Drift QN/Kavli Nanolab Delft
Research Group
QN/Kavli Nanolab Delft
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Published Date

2000

Language

Undefined/Unknown

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Research Group

QN/Kavli Nanolab Delft

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