Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin Films

La Spina, L.; van Herwaarden, AW; Schellevis, H.; Wien, W.H.A.; Nenadovi¿, N; Nanver, L.K.

Bulk-Micromachined Test Structure for Fast and Reliable Determination of the Lateral Thermal Conductivity of Thin Films

Journal article (2007)

Authors

L. La Spina Electronic Components, Technology and Materials

AW van Herwaarden External organisation

H. Schellevis Electronic Components, Technology and Materials

W.H.A. Wien Electronic Components, Technology and Materials

N Nenadovi¿ External organisation

L.K. Nanver Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2007

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Research Group

Electronic Components, Technology and Materials

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