Secondary ion mass spectrometry and atomic force spectroscopy studies of surface roughening, erosion rate change and depth resolurion in Si during 1 keV 60 degrees O2+ bombardment with oxygen flooding

Journal article (1998)

Authors

ZX Jiang External organisation
P. F.A. Alkemade Old - sect Electronic Materials (NS/EM)
Research Group
Old - sect Electronic Materials (NS/EM)
More Info
expand_more

Published Date

1998

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Old - sect Electronic Materials (NS/EM)

No files available

Metadata only record. There are no files for this journal article.