MEMS silicon-based micro-evaporator with diamond-shaped fins

Mihailovic, M.; Rops, C; Creemer, J.F.; Sarro, Pasqualina M

MEMS silicon-based micro-evaporator with diamond-shaped fins

Conference paper (2010)

Authors

M. Mihailovic Electronic Components, Technology and Materials -

C Rops External organisation

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:36ce3330-15fa-4206-bfdc-5c0d8f139744

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials