Saddle point in the merit function landscape of lithographic objectives

Journal article (2005)

Authors

OE Marinescu ImPhys/Optics - AS
Florian Bociort ImPhys/Optics - AS
JJM Braat ImPhys/Optics - AS
Research Group
ImPhys/Optics (AS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

Reuse Rights

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Faculty

Applied Sciences

Department

ImPhys/Imaging Physics

Research Group

ImPhys/Optics