Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

La Spina, L.; Ovchinnikov, D; Wien, W.H.A.; van Herwaarden, AW; Goudena, E.J.G.; Loos, J; Nanver, L.K.

Reduction of surface roughness of a silicon chip for advanced nanocalorimetry

Journal article (2008)

Authors

L. La Spina Old - EWI Sect. ECTM

D Ovchinnikov External organisation

W.H.A. Wien Electronic Components, Technology and Materials

AW van Herwaarden External organisation

E.J.G. Goudena Old - EWI Sect. ECTM

J Loos External organisation

L.K. Nanver Electronic Components, Technology and Materials

Research Group

Old - EWI Sect. ECTM

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Published Date

2008

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Research Group

Old - EWI Sect. ECTM

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