Sealing RIE etch holes for an epi-micromachined pressure sensor

Conference paper (2000)

Authors

J.F.L. Goosen Electronic Instrumentation - EEMCS
JP Dartee External organisation
C. den Boer OLD Architectural Technology
P.J. French Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2000

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation