Single-crystalline Si thin-film transistors fabricated with ¿-Czochralski (grain-filter) process

Conference paper (2002)

Authors

R. Ishihara Electronic Components, Technology and Materials -

PC van der Wilt Electronic Components, Technology and Materials -

BD van Dijk Electronic Components, Technology and Materials -

A Burtsev Electronic Components, Technology and Materials -

JW Metselaar Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

To reference this document use:

http://resolver.tudelft.nl/uuid:2d59db04-896d-45c5-8ce8-272acffdf336

More Info

expand_more

Published Date

2002

Language

Undefined/Unknown

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials