Gas viscosity sensing based on the electrostatic pull-in timeof microactuators

Journal article (2014)

Authors

RA Dias External organisation
G. de Graaf Electronic Instrumentation - EEMCS
Reinoud Wolffenbuttel Electronic Instrumentation - EEMCS
LA Machado da Rocha External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation