Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

Babaei Gavan, K; Westra, H.J.R.; van der Drift, E.W.J.M.; Venstra, WJ; van der Zant, H. S J

Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

Conference paper (2009)

Authors

K Babaei Gavan QN/Mol. Electronics & Devices

H.J.R. Westra QN/Mol. Electronics & Devices

E.W.J.M. van der Drift QN/Kavli Nanolab Delft

WJ Venstra QN/Mol. Electronics & Devices

H. S J van der Zant QN/Mol. Electronics & Devices

Research Group

QN/Mol. Electronics & Devices

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Published Date

2009

Language

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Research Group

QN/Mol. Electronics & Devices

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