Impact of fabrication technology on flexural resonances of silicon nitride cantilevers

Conference paper (2009)

Authors

K Babaei Gavan QN/Mol. Electronics & Devices
H.J.R. Westra QN/Mol. Electronics & Devices
E.W.J.M. van der Drift QN/Kavli Nanolab Delft - AS
W.J. Venstra QN/Mol. Electronics & Devices
H.S.J. van der Zant QN/Mol. Electronics & Devices
Research Group
QN/Mol. Electronics & Devices
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Published Date

2009

Language

Undefined/Unknown

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Research Group

QN/Mol. Electronics & Devices