Mechanical design and characterization for MEMS thin-film packaging

Santagata, Fabio; Zaal, J.J.M.; Huerta, VG; Mele, L.; Creemer, JF; Sarro, Pasqualina M.

Mechanical design and characterization for MEMS thin-film packaging

Journal article (2011)

Authors

Fabio Santagata Electronic Components, Technology and Materials

J.J.M. Zaal Computational Design and Mechanics

VG Huerta External organisation

L. Mele Electronic Components, Technology and Materials

JF Creemer Electronic Components, Technology and Materials

Pasqualina M. Sarro Electronic Components, Technology and Materials

Research Group

Electronic Components, Technology and Materials

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Published Date

2011

Language

English

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Research Group

Electronic Components, Technology and Materials

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