Mechanical design and characterization for MEMS thin-film packaging

Santagata, F.; Zaal, J.J.M.; Huerta, VG; Mele, L.; Creemer, J.F.; Sarro, Pasqualina M

Mechanical design and characterization for MEMS thin-film packaging

Journal article (2011)

Authors

F. Santagata Electronic Components, Technology and Materials -

J.J.M. Zaal Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering

VG Huerta External organisation

L. Mele Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:247bfdf6-578b-4d45-85b5-0326259eae9f

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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials