Relaxation of internal stresses in chemically vapour deposited TiN/TiB2 double layers.

Conference paper (1998)

Authors

J te Nijenhuis External organisation
R. Delhez OLD Virtual Materials and Mechanics
JGM Becht External organisation
Th.H de Keijser External organisation
EJ Mittemeijer OLD Virtual Materials and Mechanics
Research Group
OLD Virtual Materials and Mechanics
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Published Date

1998

Language

Undefined/Unknown

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Research Group

OLD Virtual Materials and Mechanics