Optical and surface characterization of Al2O3 nanolayer deposited by atomic layer deposition as wave guide for biomedical sensor

Abstract (2010)

Authors

A. Purniawan Electronic Instrumentation
G Pandraud Electronic Components, Technology and Materials
P. J. French Electronic Instrumentation
E Margallo Balbas Electronic Instrumentation
PM Sarro Electronic Components, Technology and Materials
Research Group
Electronic Instrumentation
More Info
expand_more

Published Date

2010

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation

No files available

Metadata only record. There are no files for this abstract.