Low power PECVD SIC delay lines for optical coherence tomography in the visible

Pandraud, G.; Mele, L.; Morana, B.; Margallo-Balbás, E; French, P.J.; Sarro, Pasqualina M

Low power PECVD SIC delay lines for optical coherence tomography in the visible

Conference paper (2011)

Authors

G. Pandraud Electronic Components, Technology and Materials -

L. Mele Electronic Components, Technology and Materials -

B. Morana Electronic Components, Technology and Materials -

E Margallo-Balbás External organisation

P.J. French Electronic Instrumentation -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2011

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials