Very large scale characterization of graphene mechanical devices using a colorimetry technique

Journal article (2017)

Authors

S.J. Cartamil Bueno QN/Steeneken Lab - AS
Alba Centeno Graphenea SA
Amaia Zurutuza Graphenea SA
P.G. Steeneken QN/Steeneken Lab - AS , Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
H.S.J. van der Zant QN/van der Zant Lab - AS
S. Houri QN/van der Zant Lab - AS
Research Group
QN/Steeneken Lab (AS) (TU Delft)
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Published Date

2017

Language

English

Reuse Rights

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Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Research Group

QN/Steeneken Lab

Abstract

We use a scalable optical technique to characterize more than 21000 circular nanomechanical devices made of suspended single- and double-layer graphene on cavities with different diameters (D) and depths (g). To maximize the contrast between suspended and broken membranes we used a model for selecting the optimal color filter. The method enables parallel and automatized image processing for yield statistics. We find the survival probability to be correlated with a structural mechanics scaling parameter given by D4/g3. Moreover, we extract a median adhesion energy of Γ = 0.9 J m-2 between the membrane and the native SiO2 at the bottom of the cavities.

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