Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

Sarro, Pasqualina M; Brida, D; van der Vlist, W.; Pignatel, G; Brida, S

Effect of surfactant on surface quality of silicon microstructures etched in saturated TMAHW solutions

Conference paper (1999)

Authors

Pasqualina M Sarro Electronic Components, Technology and Materials -

D Brida External organisation

W. van der Vlist Electronic Components, Technology and Materials -

G Pignatel External organisation

S Brida External organisation

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

1999

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials