Tube-shaped Pirani gauge for in situ hermeticity monitoring of SiN thin-film encapsulation

Journal article (2012)

Authors

F Santagata Electronic Components, Technology and Materials
JF Creemer Electronic Components, Technology and Materials
E. Iervolino Old - EWI Sect. ECTM
Lina Sarro Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2012

Language

English

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Research Group

Electronic Components, Technology and Materials