Surface-passivated high-resistivity silicon substrates for RF-IC's

Rong, B; Burghartz, JN; Nanver, L.K.; Rajaei Salmasi, B.; van der Zwan, M.

Surface-passivated high-resistivity silicon substrates for RF-IC's

Journal article (2004)

Authors

B Rong Old - EWI Ch. Integrated Sensing Devices

JN Burghartz Old - EWI Ch. Integrated Sensing Devices

L.K. Nanver Electronic Components, Technology and Materials -

B. Rajaei Salmasi Old - EWI Ch. Integrated Sensing Devices

M. van der Zwan Electronic Components, Technology and Materials -

Research Group

Old - EWI Ch. Integrated Sensing Devices

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Published Date

2004

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Research Group

Old - EWI Ch. Integrated Sensing Devices