Surface-passivated high-resistivity silicon substrates for RF-IC's

Journal article (2004)

Authors

B Rong Old - EWI Ch. Integrated Sensing Devices
JN Burghartz Old - EWI Ch. Integrated Sensing Devices
L. K. Nanver Electronic Components, Technology and Materials
B. Rajaei Salmasi Old - EWI Ch. Integrated Sensing Devices
M. van der Zwan Electronic Components, Technology and Materials
Research Group
Old - EWI Ch. Integrated Sensing Devices
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Published Date

2004

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Research Group

Old - EWI Ch. Integrated Sensing Devices

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