Sputtered molybdenum as conductive material for high-temperature microhotplates

Mele, L.; Santagata, F.; Iervolino, E.; Mihailovic, M.; Rossi, T; Tran, A.T.; Schellevis, H.; Creemer, J.F.; Sarro, Pasqualina M

Sputtered molybdenum as conductive material for high-temperature microhotplates

Conference paper (2011)

Authors

L. Mele Electronic Components, Technology and Materials -

F. Santagata Electronic Components, Technology and Materials -

E. Iervolino Old - EWI Sect. ECTM

M. Mihailovic Electronic Components, Technology and Materials -

T Rossi External organisation

A.T. Tran Electronic Components, Technology and Materials -

H. Schellevis Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Elektrotechniek Techniek

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Published Date

2011

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials