Contoured thermal V-beam actuator with improved temperature uniformity

Journal article (2008)

Authors

WP Sassen Micro and Nano Engineering
VA Henneken Micro and Nano Engineering
Marcel Tichem Micro and Nano Engineering
Pasqualina M Sarro Electronic Components, Technology and Materials
Research Group
Micro and Nano Engineering
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Published Date

2008

Language

Undefined/Unknown

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Research Group

Micro and Nano Engineering

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