Contoured thermal V-beam actuator with improved temperature uniformity

Sassen, WP; Henneken, VA; Tichem, M.; Sarro, Pasqualina M

Contoured thermal V-beam actuator with improved temperature uniformity

Journal article (2008)

Authors

WP Sassen Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

VA Henneken Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

M. Tichem Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Micro and Nano Engineering (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2008

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Micro and Nano Engineering