Effect of the interruption of the Propagation Path on the Response of Surface Acoustic Wave Transducers

Bui, T.H.; Tran, A.T.; Morana, B.; Wei, J.; Chu Duc, Trinh; Sarro, Pasqualina M

Effect of the interruption of the Propagation Path on the Response of Surface Acoustic Wave Transducers

Conference paper (2016)

Authors

T.H. Bui Electronic Components, Technology and Materials -

A.T. Tran Electronic Components, Technology and Materials -

B. Morana EKL-Users -

J. Wei EKL Processing -

Trinh Chu Duc Hanoi University of Engineering and Technology

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Piezoelectric sensors Transducer response SAW biosensors

To reference this document use:

http://resolver.tudelft.nl/uuid:0b284ddc-e26c-4b50-9673-3f41da71fc9c

More Info

expand_more

Published Date

2016

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

This paper presents the effect of an arbitrary interruption of the propagation path in Surface Acoustic Wave (SAW) microdevices on the intensity of the scattered surface waves. Using finite element modeling, simulations have been carried out to validate a new equivalent circuit based on the conventional Mason and Smith model. In addition, experimental results obtained with 30, 50 and 100 μm diameter microholes are reported. The comparison of theory, simulation and experiment proves that it is possible to fabricate an interruption like deep microcavities or microholes in the propagation path which results in an acceptable signal magnitude attenuation, but without shift in the operating frequency.