Novel damage model for delamination in Cu/low-k IC backend structures

van Gils, MAJ; van der Sluis, O; Zhang, Guo-Qi; Janssen, JHJ; Voncken, RMJ

Novel damage model for delamination in Cu/low-k IC backend structures

Conference paper (2005)

Authors

MAJ van Gils External organisation

O van der Sluis External organisation

Guo-Qi Zhang Dynamics of Micro and Nano Systems

JHJ Janssen External organisation

RMJ Voncken External organisation

Research Group

Dynamics of Micro and Nano Systems

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Published Date

2005

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Research Group

Dynamics of Micro and Nano Systems

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