Orientation dependent electron mobility behavior with downscaling of Fin-width in double and triple gate SOI FinFETS

Conference paper (2010)

Authors

M Poljak External organisation
V. Jovanovic Electronic Components, Technology and Materials - EEMCS
T Suligoj External organisation
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2010

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials