Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K

Mihailovic, M.; Creemer, J.F.; Sarro, Pasqualina M

Sheet resistance of As-doped monocrystalline silicon in temperature range up to 1100 K

Conference paper (2009)

Authors

M. Mihailovic Electronic Components, Technology and Materials -

J.F. Creemer Electronic Components, Technology and Materials -

Pasqualina M Sarro Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2009

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials