Kinetics of copper chemical vapour deposition from Cu(hfac)VTMS

Conference paper (1999)

Authors

MLH ter Heerdt External organisation
PJ van der Put External organisation
Erik Kelder Old - sect Laboratory Inorganic Chemistry (DCT/AC)
J Schoonman Old - sect Laboratory Inorganic Chemistry (DCT/AC)
Research Group
Old - sect Laboratory Inorganic Chemistry (DCT/AC)
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Published Date

1999

Language

Undefined/Unknown

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Research Group

Old - sect Laboratory Inorganic Chemistry (DCT/AC)