A dual-side fabrication method for silicon plate springs with high out-of-plane stiffness

Journal article (2007)

Authors

SL Paalvast Mechatronic Systems Design
H.W. Zeijl Electronic Components, Technology and Materials
P. M. Sarro Electronic Components, Technology and Materials
J van Eijk Mechatronic Systems Design
Research Group
Mechatronic Systems Design
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Published Date

2007

Language

Undefined/Unknown

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Research Group

Mechatronic Systems Design

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