3 records found
1
Modelling and characterization of optical micro-machined ultrasound sensors with a silicon photonic ring resonator in a buckled acoustical membrane
Sensitive optical micro-machined ultrasound sensors based on a silicon photonic ring resonator in an acoustical membrane
(invited)
A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane