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SL
SR Lokhorst
Academic Work (1)
Conference paper (1)
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The effect of sidewall roughness on line edge roughness in top-down scanning electron microscopy images
Conference paper (2015) -
T. Verduin (author)
,
SR Lokhorst (author)
,
Pieter Kruit (author)
,
P. Kruit (author)
,
P Kruit (author)
,
Cornelis Wouter Hagen (author)
,
C.W. Hagen (author)
,
C. W. Hagen (author)
,
CW Hagen (author)
,
Cornelis W. Hagen (author)
