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MJP Hopstaken
Academic Work (1)
Conference paper (1)
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Laser annealing for ultra-shallow junction formation in advanced CMOS
Conference paper (2002) -
R. Surdeanu (author)
,
YV Ponomarev (author)
,
MJP Hopstaken (author)
,
JGM van Berkum (author)
,
F Roozeboom (author)
,
R Lindsay (author)
,
R Cerutti (author)
,
BJ Pawlak (author)
,
L.K. Nanver (author)
,
I Hoflijk (author)
,
PA Stolk (author)
,
CJJ Dachs (author)
,
MA Verheijen (author)
,
M Kaiser (author)