We introduce a two-channel microfluidic atomic force microscopy (AFM) cantilever that combines the nanomechanical sensing functionality of an AFM cantilever with the ability to manipulate fluids of picolitres or smaller volumes through nanoscale apertures near the cantilever tip. Each channel is connected to a separate fluid reservoir, which can be independently controlled by pressure. Various systematic experiments with fluorescent liquids were done by either injecting the liquids from the on-chip reservoir or aspirating directly through the nanoscale apertures at the tip. A flow rate analysis of volume dosing, aspiration and concentration dosing inside the liquid medium was performed. To understand the fluid behaviour, an analytical model based on the hydrodynamic resistance, as well as numerical flow simulations of single and multi-phase conditions were performed and compared. By applying pressures between -500 mbar and 500 mbar to the reservoirs of the probe with respect to the ambient pressure, flow rates ranging from 10 fl s-1 to 83 pl s-1 were obtained inside the channels of the cantilever as predicted by the analytical model. The smallest dosing flow rate through the apertures was 720 fl s-1, which was obtained with a 10 mbar pressure on one reservoir and ambient pressure on the other. The solute concentration in the outflow could be tuned to values between 0% and 100% by pure convection and to values between 17.5% and 90% in combination with diffusion. The results prove that this new probe enables handling multiple fluids with the scope to inject different concentrations of analytes inside a single living cell and also perform regular AFM functionalities.

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Suspended microfluidic resonators enable detection of fluid density and viscosity with high sensitivity. Here, a two-legged suspended microchannel resonator that probes pico-litres of liquid is presented. The higher resonant modes (flexural and torsional) were explored for increased sensitivity and resolution. Unlike other reported microchannel resonators, this device showed an increase in the quality factor with resonant frequency value. The performance of the resonator was tested by filling the channel with three liquids, one at a time, over a density range of 779 - 1110 Kg/m^3 and a viscosity range of 0.89 - 16.2 mPa.s. The highest resolution obtained was 0.011% change in density. Measurements with torsional mode showed an improvement of about six times in sensitivity and about fifteen times in resolution compared to the first flexural mode. When the empty channel was filled with liquids of different viscosity, the quality factor of the first flexural mode remained overall constant with a variation below 3.3% between the fluids, and confirming the inherent property of suspended microchannel resonators. However, it significantly decreased for second flexural and torsional modes. No noticeable difference was observed in the quality factor between different liquid viscosities for all modes.@en

Microfluidic atomic force microscopy (AFM) cantilever probes have all the functionalities of a standard AFM cantilever along with fluid pipetting. They have a channel inside the cantilever and an aperture at the tip. Such probes are useful for precise fluid manipulation at a desired location, for example near or inside cells. They are typically made by complex microfabrication process steps, resulting in expensive probes. Here, we used two different 3D additive manufacturing techniques, stereolithography and two-photon polymerization, to directly print ready-to-use microfluidic AFM cantilever probes. This approach has considerably reduced the fabrication time and increased the design freedom. One of the probes, 564 μm long, 30 μm wide, 30 μm high, with a 25 μm diameter channel and 2.5 μm wall thickness had a spring constant of 3.7 N m^-1 and the polymer fabrication material had an elastic modulus of 4.2 GPa. Using these 3D printed probes, AFM imaging of a surface, puncturing of the cell membrane, and aspiration at the single cell level have been demonstrated.

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