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CS
C Sabatier
2 records found
1
Authored
Thermal budget considerations for excimer laser annealing of implanted dopants
Journal article (2010) -
V Gonda
,
J Venturini
,
C Sabatier
,
J. van der Cingel
,
L.K. Nanver
Thermal budget considerations for excimer laser annealing of implanted dopants
Conference paper (2009) -
V Gonda
,
J Venturini
,
C Sabatier
,
J. van der Cingel
,
L.K. Nanver
