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A Chalupka

Journal article (1)

1 records found

1

Stochastic coulomb interactions in ion projection lithography systems with aberration-broadened crossover

Journal article (1997) - P Kruit (author) , JE Barth (author) , G Lammer (author) , A Chalupka (author) , H Vonach (author) , H Löschner (author) , G Stengl (author)