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WK Waskiewicz
Academic Work (2)
Conference paper (2)
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2 records found
1
Investigation of illumination non-uniformities from an electron gun for projection electron-beam lithography.
Conference paper (1999) -
D Moonen (author)
,
MD Nijkerk (author)
,
P. Kruit (author)
,
WK Waskiewicz (author)
Uniform illumination in SCALPEL by imaging the angular distribution.
Conference paper (1999) -
D Moonen (author)
,
MD Nijkerk (author)
,
P. Kruit (author)
,
WK Waskiewicz (author)
