In this work, we report the acoustical characterization of a 9 French (Fr) CMUT-based 1D catheter tip (2.5×12.8 mm 2 - 64 elements - 7.5 MHz) embedding a 64 channels analog transceiver ASIC (180 nm HV BCD technology) dedicated to Intra-cardiac Echocardiography. To this end, a Through-Silicon-Via process has been integrated in the CMUT process flow to ensure suitable vertical integration level needed to accommodate with the catheter's form factor. Good overall functioning of essential ASIC functionalities with the CMUT, i.e. transmit, beamforming, and receive, is first reported, starting from elementary characterization up to imaging. Additionally, a comparison with a custom discrete solution based on Commercial Off-The-Shelf components (COTS) to provide suitable CMUT preamplification in receive is performed. Using the same CMUT chip either with the ASIC, either with the COTS, allowed to quantify the benefit brought by the ASIC compared to a more straightforward but less integrated solution. Main results highlight that CMUT-on-ASIC allows to recover a much wider bandwidth (BW), increasing by 3 MHz the -6dB upper limit, and therefore getting closer the theoretical BW of the CMUT itself. Moreover, lower element crosstalk is measured on CMUT-on-ASIC device, showing that the ASIC decreases the electrical coupling compared to the COTS. Finally, noise equivalent pressure measurements in comparison with simulations in realistic ICE configuration promise much higher receive sensitivity with the ASIC solution, hence, confirming its great interest for the CMUT technology compared to less integrated solution, especially for catheter application.@en

Miniature ultrasound probes, such as the intra-cardiac echography (ICE) probe shown in Fig. 23.6.1, increasingly employ in-probe ASICs to interface with the elements of an ultrasound transducer array to improve signal quality and reduce cable count [1]-[4]. For each transducer element, such an ASIC contains a pulser that drives the element to generate a pressure wave, a low-noise amplifier (LNA) that amplifies the resulting echo signal, and a time-gain compensation (TGC) circuit that compensates for the time-varying echo-signal amplitude due to propagation attenuation of the acoustic wave. Without TGC, the first echoes, from shallow tissue, are much larger than later echoes from deeper tissue. The TGC circuit corrects for this, ideally by providing a gain that increases exponentially with time, thus reducing the dynamic range (DR) by as much as 40dB and strongly relaxing the requirements of subsequent blocks. In conventional ultrasound systems, TGC is typically performed after the LNA, implying that a power-hungry LNA is required that can handle the full DR of the echo signal [5], [6]. In recent in-probe ASICs, programmable-gain LNAs have been employed that provide a step-wise TGC approximation [1]-[3]. While this saves power, the associated gain-switching transients lead to imaging artefacts. In this paper, we present an LNA with a built-in continuous TGC function that mitigates this problem. The LNA is a transimpedance amplifier (TIA) optimized to amplify the signal current of a capacitive micro-machined ultrasound transducer (CMUT). We demonstrate its integration into a 64-channel ASIC for a CMUT-based ICE probe.

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This article presents a low-noise transimpedance amplifier (TIA) designed for miniature ultrasound probes. It provides continuously variable gain to compensate for the time-dependent attenuation of the received echo signal. This time-gain compensation (TGC) compresses the echo-signal dynamic range (DR) while avoiding imaging artifacts associated with discrete gain steps. Embedding the TGC function in the TIA reduces the output DR, saving power compared to prior solutions that apply TGC after the low-noise amplifier. The TIA employs a capacitive ladder feedback network and a current-steering circuit to obtain a linear-in-dB gain range of 37 dB. A variable-gain loop amplifier based on current-reuse stages maintains constant bandwidth in a power-efficient manner. The TIA has been integrated in a 64-channel ultrasound transceiver application-specific integrated circuit (ASIC) in a 180-nm BCDMOS process and occupies a die area of 0.12 mm2. It achieves a gain error below ±1 dB and a 1.7 pA/ √ Hz noise floor and consumes 5.2 mW from a ±0.9 V supply. B-mode images of a tissue-mimicking phantom are presented that show the benefits of the TGC scheme.

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This article presents a fully integrated 64-channel programmable ultrasound transmit beamformer for catheter-based ultrasound probes, designed to interface with a capacitive micro-machined ultrasound transducer (CMUT) array. The chip is equipped with programmable high-voltage (HV) pulsers that can generate ±30-V return-to-zero (RZ) and non-RZ pulses. The pulsers employ a compact back-to-back isolating HV switch topology that employs HV floating-gate drivers with only one HV MOS transistor each. Further die-size reduction is achieved by using the RZ switches also as the transmit/receive (T/R) needed to pass received echo signals to low-voltage receive circuitry. On-chip digital logic clocked at 200 MHz allows the pulse timing to be programmed with a resolution of 5 ns, while supporting pulses of 1 cycle up to 63 cycles. The chip has been implemented in 0.18-μm HV Bipolar-CMOS-DMOS (BCD) technology and occupies an area of 1.8 mm ×16.5 mm, suitable for integration into an 8-F catheter. Each pulser with embedded T/R switch and digital logic occupies only 0.167 mm2. The pulser successfully drives an 18-pF transducer capacitance at pulse frequencies up to 9 MHz. The T/R switch has a measured ON-resistance of ~180Ω. The acoustic results obtained in combination with a 7.5-MHz 64-element CMUT array demonstrate the ability to generate steered and focused acoustic beams.

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