CAM Steenbergen | TU Delft Repository

CS

CAM Steenbergen

Conference paper (1)

Journal article (1)

2 records found

1

Plasma-enhanced chemical vapor deposition of thick silicon nitride films with low stress on inP.

Journal article (1996) - L. Shi (author), CAM Steenbergen (author), AH de Vreede (author), MK Smit (author), TLM Scholtes (author), FH Groen (author), JW Pedersen (author)

Compact low-loss 8x10 Ghz polarisation independent WDM receiver

Conference paper (1996) - CAM Steenbergen (author), C. Dam (author), A Looijen (author), CGP Herben (author), M. de Kok (author), MK Smit (author), JW Pedersen (author), I Moerman (author), RG Baets (author), BH Verbeek (author)