SM Spearing | TU Delft Repository

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SM Spearing

Conference paper (1)

1 records found

1

Wafer bonding with nanoprecision alignment for micro/nano systems

Conference paper (2007) - L Jiang (author), G Pandraud (author), G. Pandraud (author), Gregory Pandraud (author), PJ French (author), P. J. French (author), Patrick J. French (author), Paddy French (author), Paddy J. French (author), P.J. French (author), Pim J. French (author), SM Spearing (author), M kraft (author)