M Cooke | TU Delft Repository

MC

M Cooke

Conference paper (1)

Journal article (1)

2 records found

1

Pattern transfer into silicon using sub-10 nm masks made by electron beam-induced deposition

Journal article (2015) - M. Scotuzzi (author), M.J. Kamerbeek (author), A Goodyear (author), M Cooke (author), C.W. Hagen (author), Cornelis W. Hagen (author), C. W. Hagen (author)

Pattern transfer into silicon using sub-10 nm masks made by electron beam induced deposition

Conference paper (2015) - M. Scotuzzi (author), M.J. Kamerbeek (author), A Goodyear (author), M Cooke (author), C.W. Hagen (author), Cornelis W. Hagen (author), C. W. Hagen (author)