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JL Plawsky
Academic Work (1)
Journal article (1)
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Energy transport in plasma etching of nanoporous dielectric materials
Journal article (2004) -
JL Plawsky (author)
,
S Ponoth (author)
,
G Dalakos (author)
,
K Malek (author)
,
MO Coppens (author)
,
MO Coppens (author)
