The discovery of a new class of high-T//c superconducting materials has induced a renewed interest in the possibilites of superconducting thin film devices. As the thin YBa//2Cu//3O//7// minus // delta films appear to have a semi single-crystalline character they are also perfect
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The discovery of a new class of high-T//c superconducting materials has induced a renewed interest in the possibilites of superconducting thin film devices. As the thin YBa//2Cu//3O//7// minus // delta films appear to have a semi single-crystalline character they are also perfectly suited to study the physics of these materials. Both for materials characterization and the study of the physics of these materials the reproducibility is crucial. The authors demonstrate the possibilities of two structuring methods: reactive ion etching and local amorphisation by energetic (260 keV) ions.@en