Amorphous silicon waveguides for microphotonics

1, 2 and 3 dimensional photonic materials made using ion beams: fabrication and optical density-of-states/

Novel method for solution growth of thinsilica films from tetraethoxysilane.

Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

Fabrication of 2-D photonic crystal waveguides for 1.5 micrometer in silicon by deep anisotropic dry etching.

Fabrication of 2D photonic crystal waveguides for 1.5 µm in silicon by deep anisotropic dry etching.