WG

Widesh Gahar

1 records found

This study presents an AlN based Lamb wave (A0 mode) liquid sensing device that can be used for biomedical applications. The Lamb wave device features a 1.5 μm composite membrane consisting of a 500 nm LPCVD SiN and a 1 μm of a c-axis oriented AlN film. A 45° rotated design was a ...