Reducing intrinsic loss in superconducting resonators by surface treatment and deep etching of silicon substrates

Journal article (2015)

Authors

Alessandro Bruno QN/Quantum Transport
G. de Lange QN/Quantum Transport
S Asaad External organisation
KL van der Enden External organisation
N. K. Langford QN/Quantum Transport
Leonardo Dicarlo QN/Quantum Transport
Research Group
QN/Quantum Transport
More Info
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Published Date

2015

Language

English

Reuse Rights

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Research Group

QN/Quantum Transport

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