Capacitance-to-digital converter for accurate displacement measurement in the sub-nanometre range

Conference paper (2014)

Authors

R Nojdelov External organisation
S. Nihtianova Electronic Instrumentation - EEMCS
A Yacoot External organisation
D Voigt External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2014

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation