Defecten in molybdeen-lagen en de effecten van ionenbundel-assistentie tijdens het opdampen.

Journal article (1998)

Authors

BA Korevaar Electronic Components, Technology and Materials - EEMCS
CJ Pols External organisation
J van der Kuur OLD Virtual Materials and Mechanics
B.J. Thijsse OLD Virtual Materials and Mechanics
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

1998

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials