Integrating low-temperature carbon nanotubes as vertical interconnects in Si technology

Book chapter (2013)

Authors

S Vollebregt Electronic Components, Technology and Materials
R. Ishihara Electronic Components, Technology and Materials
J. Derakhshandeh Kheljani Electronic Components, Technology and Materials
J. van der Cingel Electronic Components, Technology and Materials
C. W J Beenakker Electronic Components, Technology and Materials
Research Group
Electronic Components, Technology and Materials
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Published Date

2013

Language

English

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Research Group

Electronic Components, Technology and Materials

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