Integrating low-temperature carbon nanotubes as vertical interconnects in Si technology

Book chapter (2013)

Authors

S. Vollebregt Electronic Components, Technology and Materials -

R. Ishihara Electronic Components, Technology and Materials -

J. Derakhshandeh Kheljani Electronic Components, Technology and Materials -

J. van der Cingel Electronic Components, Technology and Materials -

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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http://resolver.tudelft.nl/uuid:f76550ab-33c2-4800-a744-4bbac07074af

More Info

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Published Date

2013

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials