Nanopillar Growth by Focused Helium Ion Beam Induced Deposition

Chen, P; Veldhoven, E van; Sanford, C.A.; Salemink, H.W.M.; Maas, D; Smith, D; Rack, P.D.; Alkemade, Paul

Nanopillar Growth by Focused Helium Ion Beam Induced Deposition

Journal article (2010)

Authors

P Chen QN/Kavli Nanolab Delft

E van Veldhoven External organisation

C.A. Sanford External organisation

H.W.M. Salemink QN/Photronic Devices

D Maas External organisation

D Smith External organisation

P.D. Rack External organisation

Paul Alkemade QN/Kavli Nanolab Delft

Research Group

QN/Kavli Nanolab Delft

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Published Date

2010

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Research Group

QN/Kavli Nanolab Delft

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