Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Buja, F.; Kokorian, J.; Sumant, AV; van Spengen, Merlijn

Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Journal article (2015)

Authors

F. Buja Micro and Nano Engineering

J. Kokorian Micro and Nano Engineering

AV Sumant Argonne National Laboratory

Merlijn van Spengen Micro and Nano Engineering

Department

Precision and Microsystems Engineering

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Published Date

2015

Language

English

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Department

Precision and Microsystems Engineering

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